Temperature sensor for wafer tool
Getting a Grip on Heat in the Smart Fab Building a smart Fab isn’t just about throwing a bunch of sensors at your tools and hoping for the...
Reflector for wafer curing lamp
Stopping the Flake: How We Handle Wafer Curing When you’re working in a Class 100 cleanroom, there’s no such thing as “just a...
Energy efficient wafer heater
Stop Wasting Your Heat Let’s be honest: heating wafers is usually a bit of a mess. If you’re using standard quartz lamps, you’re...
MEMS sensor wafer drying heater
Stopping the Nightmare of Lamp Bursts in MEMS Drying If you’ve ever worked in a high-load production environment, you know the stress. But...
Safety distance for wafer heating
Why we’re switching to IR Curing for lead-free semiconductors The industry is pushing hard toward “green” and lead-free standards....
Precision IR sensor for wafer
Stop Heating the Air: A Smarter Way to Process Wafers If we’re actually going to hit those carbon neutrality goals in the fab, we have to stop...
Halogen IR emitter for wafer drying
On the fab floor, a single watermark can kill an entire lot. Traditional drying methods walk a tightrope—thermal stress on one side, particle...
Zoned heating for advanced wafer fab
On the fab floor, a 1°C swing during photoresist soft bake is enough to walk your critical dimensions and scrap a whole lot of wafers. Conventional...
Semiconductor wafer probe heater
Out on the fab floor, the probe card is under the scope, waiting to run the next lot. If the wafer temperature drifts even a fraction of a degree,...
Cost of infrared wafer heater lamp
On the fab floor, every wafer has a thermal budget, and you can’t go over it. Soft bake or hard bake drift by even a fraction of a degree, and...