http://infra-quartz-heat.com/zh/tags/%E6%B5%81%E7%A8%8B%E5%B7%A5%E5%BA%8F/ Recent content in 流程；工序 on Infrared Quartz Heat Solutions Hugo zh Wed, 03 Jun 2026 10:18:34 +0800 http://infra-quartz-heat.com/zh/posts/ashing-process-heating-infrared/ Wed, 03 Jun 2026 10:18:34 +0800 http://infra-quartz-heat.com/zh/posts/ashing-process-heating-infrared/ <p><img src="http://infra-quartz-heat.com/images/a071a4619f1d04d8f3e2839bd3740f1c.png" alt="灰化过程加热红外线"></p> <p>在晶圆厂车间，灰化绝非可选步骤——它是去除光刻胶的热处理工序，必须在不影响下层薄膜的前提下完成。如果温度偏移或曲线下陷，就会产生残留物，影响良率，进而影响光刻层叠结构。</p>